CATEGORY: HYDROGEN
Micro & Nano Letters, IET, Volume: 8 ,
Issue: 10, 2013 , Page(s): 668 - 671
Micromachined
catalytic combustion type gas sensor for hydrogen detection
Xifeng Liu ; Hanpeng Dong ; Shanhong Xia
Abstract
Authors describe a catalytic combustion hydrogen sensor fabricated using the
microelectromechanical system technology. Electron beam evaporation was
employed to apply hafnium oxide thin films as the insulating layer. Researchers
prepared the semiconductor combustion catalyst tin oxide layer by chemical
vapor deposition, which is a novel application of semiconductor material to a
catalytic combustion gas sensor. The resistivity of hafnium dioxide thin film
is about 3 × 1012 Ω cm at 900°C. Both the sensing elements and the reference
elements could be connected in a suitable circuit such as a Wheatstone
configuration with low power consumption. The catalytic combustion sensor shows
high response to hydrogen at an operating voltage of 4 V and has a higher
relative sensitivity and a good linearity for concentrations of hydrogen
ranging from 0 to 4% in volume. Good consistency and high accuracy of the
micromachined catalytic combustion gas sensor were achieved.
Introduction:
Hydrogen
is dangerous gas. To avoid hydrogen explosion accidents, research to achieve a
hydrogen catalytic sensor which is fast, has wide range and high sensitivity is
of great significance. Catalytic combustion gas sensors have been widely used
for many years to detect flammable gases because of their simple structure, low
cost, good stability and anti-poisoning properties. With the development of
microelectromechanical system (MEMS) technology, silicon micromachining has
been used to manufacture modern catalytic combustion gas sensors on silicon
substrate with thin film deposition.
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